Elasto-Capillary Folding Using Stop-Programmable Hinges Fabricated by 3D Micro-Machining.

Autor: Antoine Legrain, Erwin J W Berenschot, Niels R Tas, Leon Abelmann

Publikováno v: PLoS ONE, Vol 10, Iss 5, p e0125891 (2015)

We show elasto-capillary folding of silicon nitride objects with accurate folding angles between flaps of (70.6 ± 0.1)° and demonstrate the feasibility of such accurate micro-assembly with a final folding angle of 90°. The folding angle is defined

Externí odkaz: https://doaj.org/article/a782943a5cff496a8b001610a602bbb9

Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones

Autor: Dirk Jonker, Erwin J. W. Berenschot, Niels R. Tas, Roald M. Tiggelaar, Arie van Houselt, Han J. G. E. Gardeniers

Publikováno v: Nanoscale Research Letters, Vol 17, Iss 1, Pp 1-16 (2022)

Abstract Convex cylindrical silicon nanostructures, also referred to as silicon nanocones, find their value in many applications ranging from photovoltaics to nanofluidics, nanophotonics, and nanoelectronic applications. To fabricate silicon nanocone

Externí odkaz: https://doaj.org/article/e2a2517c92ce4d5cb44be13512cf1a59

Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices

Autor: Erwin Berenschot, Roald M. Tiggelaar, Bjorn Borgelink, Chris van Kampen, Cristian S. Deenen, Yasser Pordeli, Haye Witteveen, Han J. G. E. Gardeniers, Niels R. Tas

Publikováno v: ACS Applied Nano Materials, 5(10), 15847-15854. American Chemical Society

High-density arrays of silicon wedges bound by {111} planes on silicon (100) wafers have been created by combining convex corner lithography on a silicon dioxide hard mask with anisotropic, crystallographic etching in a repetitive, self-aligned multi

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::41b8cf7cf06129435ab81af6682e5a2c
https://doi.org/10.1021/acsanm.2c04079

A Self-Aligned Wafer-Scale Gate-All-Around Aperture Definition Method for Silicon Nanostructures

Autor: Dirk Jonker, Erwin J. W. Berenschot, Roald M. Tiggelaar, Niels R. Tas, Arie van Houselt, Han J.G.E. Gardeniers

Publikováno v: 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, 561-564
STARTPAGE=561;ENDPAGE=564;TITLE=35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

A novel fabrication technique is developed to deliver self-aligned gate structures on vertically aligned periodic silicon nanocones with gate aperture radii of 65±3 nm and a surface density of 1.6 billion structures cm-2 across the 100 mm diameter s

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::455f81b15f0b755992193720105b6c28
https://doi.org/10.1109/mems51670.2022.9699565

Fabrication and characterization of microfluidic pedestal nozzles enabling geometric contact line pinning

Autor: Bjorn T.H. Borgelink, Erwin J.W. Berenschot, Remco G.P. Sanders, Stefan Schlautmann, Niels R. Tas, Han J.G.E. Gardeniers

Publikováno v: Sensors and Actuators B: Chemical, 365:131943. Elsevier
Sensors and Actuators B: Chemical

Microfluidic pedestal nozzles have been fabricated using self-aligned wafer-scale microfabrication methods. Through implementation of these novel fabrication strategies, nozzles with a concentric rim at the nozzle exit were made. The process allows t

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::045d1289764d099617c424e75441bf6b
https://research.utwente.nl/en/publications/5f091fe9-ac53-4235-a4b2-d2bf3b5cfba4