Zobrazeno 1 - 10
of 20
pro vyhledávání: '"Nicolo Chiodarelli"'
Autor:
Nicolo Chiodarelli, Hsin-Ling Liang, Michael De Volder, Hassan Abbas Khawaja, Taimur Rashid, Madiha Taimur, Kåre Edvardsen
Accepted manuscript version, licensed CC BY-NC-ND 4.0. Carbon nanotube (CNT) films are gaining traction in applications such as transparent conductive films, electro-magnetic shields and thin film heaters. However, to date, few cost-effective large-a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::aae27bbc098d26dd1e9e26d315b184c7
https://hdl.handle.net/10037/19988
https://hdl.handle.net/10037/19988
Publikováno v:
2019 IEEE International Ultrasonics Symposium (IUS) | 2019 IEEE International Ultrasonics Symposium (IUS) | 06/10/2019-09/10/2019 | Glasgow, UK
Archivo Digital UPM
Universidad Politécnica de Madrid
Archivo Digital UPM
Universidad Politécnica de Madrid
Next generations of physical and chemical vacuum deposition systems require more accurate and faster sensors to monitor the deposition of very thin films (nm range). Acoustic sensors, particularly QCMs, have been typically used in such systems. Howev
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::50980df5b14204391e0cf2107b7845fd
http://oa.upm.es/65261/
http://oa.upm.es/65261/
Autor:
Nicolo Chiodarelli, Michael De Volder
Publikováno v:
Carbon
Understanding how to produce concentrated Carbon Nanotube (CNT) suspensions at high-throughput is key for the production of CNT-based products, as these allow for a straightforward integration of CNT powders in a variety of applications. In this work
Publikováno v:
Carbon. 60:139-145
This work describes a novel approach to fabricate horizontal nanotube interconnects with dimensions comparable to state-of-the-art copper interconnects. The interconnects consist of carbon nanotubes bundles with wall density ≈1013 cm−2, wire leng
Autor:
Nicolo Chiodarelli, Gerald Beyer, Yusaku Kashiwagi, Bart Vereecke, Daire J. Cott, Stefan De Gendt, Lieve Teugels, Masahito Sugiura, Cedric Huyghebaert, Zsolt Tokei, Philippe M. Vereecken, Rudy Caluwaerts, Marleen H. van der Veen, Marc Heyns
Publikováno v:
Microelectronic Engineering. 106:106-111
Carbon nanotubes (CNTs) were integrated successfully into 150nm contact holes having a TiN underlayer and a Cu single damascene top contact module. All the integration steps for CNT integration, for patterning the Cu top contact and the mask-set used
Autor:
Nicolo Chiodarelli, Stefan De Gendt, Marc Heyns, Hugo Bender, Philippe M. Vereecken, Olivier Richard, Guido Groeseneken
Publikováno v:
Carbon. 50:1748-1752
We propose an empirical law correlating the average number of walls and the average diameter in a population of multi-wall carbon nanotubes grown by catalytic chemical vapor deposition. The relationship and its dispersion are derived from the statist
Autor:
Nicolo Chiodarelli, Philippe M. Vereecken, Marc Heyns, Yunlong Li, Stefan De Gendt, Guido Groeseneken, Daire J. Cott, Sofie Mertens, Nick Peys
Publikováno v:
Microelectronic Engineering. 88:837-843
Carbon nanotubes (CNTs) are considered a promising material for interconnects in the future generations of microchips because of their low electrical resistance and excellent mechanical stability. In particular, CNT-based contacts appear advantageous
Autor:
Daire J. Cott, Marc Heyns, Guido Groeseneken, Nicolo Chiodarelli, Philippe M. Vereecken, Kai Arstila, Kristof Kellens, Nick Peys, Stefan De Gendt
Publikováno v:
ECS Transactions. 19:11-24
Carbon nanotubes (CNTs) are considered a promising material for interconnects for future generation microchips. The integration of vertical CNT in a processing environment is evaluated in this work. Extrapolated performances of CNT-based interconnect
Autor:
Nicolo Chiodarelli, Quoc Toan Le, Martine Claes, Guy Vereecke, Johan Keldermans, Els Kesters, Marcel Lux
Publikováno v:
Japanese Journal of Applied Physics. 47:6870-6874
Dry ashing of photoresist (PR) using oxygen-containing plasma applied subsequently to an etch plasma leads to degradation of porous low-k material. The surface region is substantially depleted in carbon. The low-k film becomes more hydrophilic after
Autor:
Philippe M. Vereecken, Daire J. Cott, Nicolo Chiodarelli, Can Zhang, John Robertson, Caroline Whelan
Publikováno v:
physica status solidi (b). 245:2308-2310
In this study, we evaluate the possibility of achieving horizontal carbon nanotube (CNT) growth for application as global interconnects in VLSI integrated circuits. A test structure suitable for electrical characterization has been designed and fabri