Zobrazeno 1 - 1
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pro vyhledávání: '"Nicolai A. Bert"'
Publikováno v:
SPIE Proceedings.
Recently the microelectronics devices fabricated on the basis of the topological structures with conic or point elements are applied widely. The traditional method of formation of the structures using an electron beam lithography, a chemical or ion b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9f9fa2d171dbc54f4920f8bc7f19b38e
https://doi.org/10.1117/12.275806
https://doi.org/10.1117/12.275806
