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pro vyhledávání: '"Nian-Huei Chen"'
Autor:
Nian-Huei Chen, 陳念暉
95
Surface acoustic wave (SAW) filters are widely used in instruments of mobile communication and ratio frequency identification (RFID) because they have the advantages of small size, light weight, and compatible with IC process. For RFID used i
Surface acoustic wave (SAW) filters are widely used in instruments of mobile communication and ratio frequency identification (RFID) because they have the advantages of small size, light weight, and compatible with IC process. For RFID used i
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/28801847630118824593
Publikováno v:
ECS Journal of Solid State Science and Technology. 1:P190-P196
Publikováno v:
Journal of Micromechanics and Microengineering. 21:045021
A GHz band surface acoustic wave (SAW) filter was fabricated by UV-nanoimprint lithography (UV-NIL). The key techniques to produce a SAW filter include stamp and interdigital transducer (IDT) fabrication. For the stamp, high-aspect-ratio (AR) hydroge