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pro vyhledávání: '"Ni-Ni Cheng"'
Autor:
Shao-Qing Wang, Ni-Ni Cheng, Hai-An Wang, Yi-Fan Jia, Qin Lu, Jing Ning, Yue Hao, Xiang-Tai Liu, Hai-Feng Chen
Publikováno v:
Chinese Physics B. 32:048502
The β-Ga2O3 films with different thicknesses are prepared by an atomic layer deposition system. The influence of film thickness on the crystal quality is obvious, indicating that the thicker films perform better crystal quality, which is verified fr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::39a82d8c64b25fd7e521737a5f157ee3
https://doi.org/10.1088/1674-1056/ac8ce9
https://doi.org/10.1088/1674-1056/ac8ce9
