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pro vyhledávání: '"Nguyen Kim Thah"'
Autor:
Ki-Woo Song, Hyun-Jin Shin, Hyun-Woong Choi, Seong-Hyun Kim, Sunil Babu Eadi, Nguyen Kim Thah, Hi-Doek Lee
Publikováno v:
Sensors and Actuators B: Chemical. 353:131082
Different indium–gallium–zinc oxide (IGZO) thin films were prepared in a N2 environment by varying the annealing pressure and then tested for NO2 gas detection. These thin films, whose average thickness ranged between 5 and 100 nm, were deposited