Zobrazeno 1 - 10
of 44
pro vyhledávání: '"Ngoi Kok Ann Bryan"'
Autor:
Fu, Yongqi, Ngoi, Kok Ann Bryan
Holes with different sizes from microscale to nanoscale were directly fabricated by focused ion beam (FIB) milling in this paper. Maximum aspect ratio of the fabricated holes can be 5:1 for the hole with large size with pure FIB milling, 10:1 for gas
Externí odkaz:
http://hdl.handle.net/1721.1/7450
Autor:
Fu, Yongqi, Ngoi, Kok Ann Bryan
Three types of focused ion beam machine: focused ion beam milling (FIB milling), focused ion beam lithography (FIB lithography), and focused ion beam direct deposition (FIB deposition), are described in detail to compare with electron beam lithograph
Externí odkaz:
http://hdl.handle.net/1721.1/3904
Autor:
Fu, Yongqi, Ngoi, Kok Ann Bryan
Optical properties (transmission and refractive index) and chemical structure (XPS) of diamond-like coating (DLC) film before and after focused ion beam milling (FIBM) process, were investigated in this paper. It is shown by our FIBM experiment that
Externí odkaz:
http://hdl.handle.net/1721.1/3736
Femtosecond laser pulse has been used for the machining of the gratings primarily due to its superior advantages over conventional continuous wave (CW) and long pulse lasers for micromachining. In this paper, we develop a novel technique for the fabr
Externí odkaz:
http://hdl.handle.net/1721.1/4027
Photomasks are the backbone of microfabrication industries. Currently they are fabricated by lithographic process, which is very expensive and time consuming since it is a several step process. These issues can be addressed by fabricating photomask b
Externí odkaz:
http://hdl.handle.net/1721.1/4029
Publikováno v:
Microelectronics Journal. 35:111-115
A novel method combining focused ion beam (FIB) milling and image processing for fine trimming of micro-device is introduced in detail in this paper. By using small beam spot size and beam current, selective milling can be realized according to requi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e3d23f14863c55129a10dfa5f9044349
https://doi.org/10.1016/j.mejo.2003.10.006
https://doi.org/10.1016/j.mejo.2003.10.006
Publikováno v:
Review of Scientific Instruments. 74:3689-3692
Optical properties (transmission and refractive index) and chemical structure (x-ray photoelectron spectroscopy) of a diamond-like coating (DLC) before and after focused ion beam milling (FIBM) process were investigated in this article. We find no in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cc4eac272de59c6ee9573ffe9bb1118f
https://doi.org/10.1063/1.1593812
https://doi.org/10.1063/1.1593812
Publikováno v:
The International Journal of Advanced Manufacturing Technology. 17:835-839
Submicron linewidth direct deposition is a challenge for focused ion beam technology. A high-resolution image is the first necessary condition in order to obtain such a fine deposited line. Besides this, dwell time, X and Y pixel space, beam current,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9886a24e62be68940a51b16e39fb1c58
https://doi.org/10.1007/s001700170111
https://doi.org/10.1007/s001700170111
Publikováno v:
Sensors and Actuators A: Physical. 88:58-66
Deposition of metal or insulator by focused ion beam (FIB) technology is very useful for microsensor fabrication, IC chip modification and failure analysis. Characteristics of depositing tungsten is studied, and physical model is put forth in this pa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9436bf1edd2fc25bf9dfe5a0b8f6a9d1
https://doi.org/10.1016/s0924-4247(00)00490-8
https://doi.org/10.1016/s0924-4247(00)00490-8
Publikováno v:
Microelectronic Engineering. 54:287-293
The diffractive optical element (DOES) with continuous relief and submicron feature size is very useful for optical fibre communication due to its perfect coupling. Microfabrication of the DOES by focused ion beam (FIB) technology is introduced in de
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::55c651e9e0e3efefb09b3c79a21e59d8
https://doi.org/10.1016/s0167-9317(00)00408-1
https://doi.org/10.1016/s0167-9317(00)00408-1