Analysis of Wetting Transition and Pattern Collapse During the Drying Process of Deep Trench Isolation Structures Using Ultra-High Frequency Acoustic Waves and SEM Imaging

Autor: Salhab, Abbas, Carlier, Julien, Toubal, Malika, Campistron, Pierre, Neyens, Marc, Nongaillard, Bertrand, Thomy, Vincent

Publikováno v: 16ème Congrès Français d'Acoustique, CFA2022
16ème Congrès Français d'Acoustique, CFA2022, Société Française d'Acoustique; Laboratoire de Mécanique et d'Acoustique, Apr 2022, Marseille, France
16ème Congrès Français d'Acoustique, CFA 2022
16ème Congrès Français d'Acoustique, CFA 2022, Société Française d'Acoustique; Laboratoire de Mécanique et d'Acoustique, Apr 2022, Marseille, France
16ème Congrès Français d'Acoustique, CFA 2022, Apr 2022, Marseille, France

International audience; Removing contaminants from silicon wafers surface is an important part in the semi-conductors industry. Wet cleaning processes are essential steps as they are used after each operation (lithography, etching, etc…) in order t

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::0fbf8696ea63ac33ce24c0b272deb1fc
http://hdl.handle.net/20.500.12210/78492

Polydimethylsiloxane Micro-Channels Application for the Study of Dynamic Wetting of Nano-Etched Silicon Surfaces Based on Acoustic Characterization Method

Autor: Salhab, Abbas Ramez, Carlier, Julien, Campistron, Pierre, Neyens, Marc, Toubal, Malika, Nongaillard, Bertrand, Thomy, Vincent

Publikováno v: Diffusion and Defect Data Part B: Solid State Phenomena; February 2021, Vol. 314 Issue: 1 p143-149, 7p

Wet Etchant Diffusion through Photoresist during Gate Oxide Patterning

Autor: Neyens, Marc, Garnier, Philippe, Garach, Manon, Rochat, Nevine, Licitra, Christophe, Tiron, Raluca

Publikováno v: ECS Transactions; September 2015, Vol. 69 Issue: 8 p177-183, 7p

Acoustic Characterization of Patterning Degradation during Wet Etching

Autor: Virgilio, Christophe, Garnier, Philippe, Foucaud, Mathieu, Devos, Arnaud, Pinceau, David, Carlier, Julien, Campistron, Pierre, Nongaillard, Bertrand, Neyens, Marc, Broussous, Lucile

Publikováno v: ECS Transactions; September 2015, Vol. 69 Issue: 8 p185-190, 6p