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Autor:
Alexandr POGREBNJAK, Viacheslav BAIDAK, Vyacheslav BERESNEV, Petr TURBIN, Nemat MAKHMUDOV, Maxim IL’YASHENKO, Dmitrii KOLESNIKOV, Mannab TASHMETOV
Publikováno v:
Medžiagotyra, Vol 19, Iss 2, Pp 140-143 (2013)
Hard and super hard coatings of Zr-Ti-Si-N of from 2.8 μm to 3.5 μm thickness were fabricated using a vacuum arc source with high frequency stimulation. The samples were annealed in vacuum and in air at 1200 °C. It was found that films with a high
Externí odkaz:
https://doaj.org/article/80bc39a6c19f41cc8b309831085ae7da