Measuring acid generation efficiency in chemically amplified resists with all three beams.

Autor: Szmanda, Charles R., Brainard, Robert L., Mackevich, Joseph F., Awaji, Akira, Tanaka, Tsutomu, Yamada, Yutaka, Bohland, John, Tedesco, Serge, Dal'Zotto, Bernard, Bruenger, Wilhelm, Torkler, Michael, Fallmann, Wolfgang, Loeschner, Hans, Kaesmaier, Rainer, Nealey, Paul M., Pawloski, Adam R.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1999, Vol. 17 Issue 6, p3356-3361, 6p