Design, fabrication and characterization of a suspended plate mechano-optical modulator.

Autor: Nawazuddin, M. B. Syed, de Boer, M., Berenschot, J. W., Ma, K. C., Elwenspoek, M., Wiegerink, R. J.

Publikováno v: 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS); 1/ 1/2013, p560-563, 4p