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Publikováno v:
2015 12th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (ECTI-CON).
We have demonstrated the fabrication of lateral InAs quantum dot molecules (QDMs) on InGaAs square-like nanohole templates by 2-step growth technique using solid-source molecular beam epitaxy (MBE). In this work, the first step of fabrication process