Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Nathalie Frolet"'
Intra track backside cleaning optimization to reduce the focus spot in Immersion lithography cluster
Autor:
Nathalie Frolet, Emma Porcheron, Karine Jullian, Michael May, Yuji Tanaka, Masahiko Harumoto, Raluca Tiron
Publikováno v:
Advances in Patterning Materials and Processes XXXIX.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8cf9c0d8b8cae4e77893a6b26d0d8a3d
https://doi.org/10.1117/12.2614242
https://doi.org/10.1117/12.2614242
Autor:
Harolod Stokes, Raluca Tiron, Nathalie Frolet, Tomohiro Motono, Chisayo Mori, Masahiko Harumoto, You Arisawa, Masaya Asai, Maxime Argoud, Karine Jullian, Tanaka Yuji, Charlotte Bouet
Publikováno v:
Advances in Patterning Materials and Processes XXXVII.
Directed Self Assembly (DSA) is a promising technology for complementary patterning in future nodes. As DSA patterning has continued to evolve there has been many efforts to improve defect performance using hardware, processes, and materials. Traditi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1585ef3dfcf6036eab87b2360518b918
https://doi.org/10.1117/12.2561259
https://doi.org/10.1117/12.2561259
Publikováno v:
Applied Surface Science
Applied Surface Science, Elsevier, 2018, pp. 97-106
Applied Surface Science, 2018, 445 pp. 97-106
Applied Surface Science, Elsevier, 2018, pp. 97-106
Applied Surface Science, 2018, 445 pp. 97-106
The structuration of various polymeric films has been studied to create superhydrophobic surfaces. Nanoimprint lithography and/or plasma etching processes with CF4/Ar have been used on FEP, PMMA and PET polymer films. On the one hand, the effect of t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d466166283b8e69a1ce901be9e930964
https://hal.univ-grenoble-alpes.fr/hal-01825529
https://hal.univ-grenoble-alpes.fr/hal-01825529
Publikováno v:
Journal of Raman Spectroscopy. 44:1049-1057
Agx(Ge0.25Se0.75)100−x glasses with x varying from 0 to 25 have been shown to exhibit a conductivity threshold around x ~8–10. In this work, the structural changes induced by introduction of Ag in Ge25Se75 glass have been investigated using Raman
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ddeb594780df0a08e3aebbace2d749ac
https://doi.org/10.1002/jrs.4320
https://doi.org/10.1002/jrs.4320
Publikováno v:
Applied Macromolecular Chemistry and Physics
Applied Macromolecular Chemistry and Physics, 2018, 219 (1800070), ⟨10.1002/macp.201800070⟩
Applied Macromolecular Chemistry and Physics, 2018, 219 (1800070), ⟨10.1002/macp.201800070⟩
International audience; Superhydrophobic surfaces have been fabricated on flexible fluorinated ethylene propylene (FEP) foils using nanoimprint lithography (NIL) and roughening by plasma etching. The combination of these two techniques results in hie
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::03a7e9ebbe3593f80eb54de24c630334
https://doi.org/10.1002/macp.201800070
https://doi.org/10.1002/macp.201800070
Morphology and structural studies of Ag photo-diffused GeySe1−y thin films prepared by RF-sputtering
Publikováno v:
Journal of Non-Crystalline Solids
Journal of Non-Crystalline Solids, Elsevier, 2009, 355, pp.1969-1972. ⟨10.1016/j.jnoncrysol.2009.05.060⟩
Journal of Non-Crystalline Solids, Elsevier, 2009, 355, pp.1969-1972. ⟨10.1016/j.jnoncrysol.2009.05.060⟩
Thin films of Ag photo-doped-Ge y Se 1− y films were prepared by RF co-sputtering technique. A systematic study of the relation existing between the host layer composition and the saturation rate in silver was carried out. Morphology and compositio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7619191f7a37535fdd173e794c8689d8
https://doi.org/10.1016/j.jnoncrysol.2009.05.060
https://doi.org/10.1016/j.jnoncrysol.2009.05.060
Publikováno v:
Materials Science and Engineering: B
Materials Science and Engineering: B, Elsevier, 2008, 150 (3), pp.199. ⟨10.1016/j.mseb.2008.05.003⟩
Materials Science and Engineering: B, Elsevier, 2008, 150 (3), pp.199. ⟨10.1016/j.mseb.2008.05.003⟩
A series of three Vycor glass/LiI composites were prepared by impregnating molten LiI into a porous Vycor ® 7930 powdered glass. X-ray diffraction showed the presence of LiI and LiI, H 2 O crystallites of about 100 nm in size. Scanning electron micr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6319114e95f32a46a029b2d6f5fc038d
https://doi.org/10.1016/j.mseb.2008.05.003
https://doi.org/10.1016/j.mseb.2008.05.003
Publikováno v:
Microporous and Mesoporous Materials
Microporous and Mesoporous Materials, Elsevier, 2007, 99, pp.56. ⟨10.1016/j.micromeso.2006.08.032⟩
Microporous and Mesoporous Materials, Elsevier, 2007, 99, pp.56. ⟨10.1016/j.micromeso.2006.08.032⟩
6 pages; International audience; The paper reports on the elaboration and characterisation of ‘‘porous glass–ionic conductor'' composite. The Vycor(r) 7930, a porous glass from Corning, was used as a bulk porous insulating matrix where silver i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d17495612ab10fdf9ec179987c1594a4
https://doi.org/10.1016/j.micromeso.2006.08.032
https://doi.org/10.1016/j.micromeso.2006.08.032
Publikováno v:
Solid State Ionics
Solid State Ionics, Elsevier, 2006, 177, pp.3009. ⟨10.1016/j.ssi.2006.07.052⟩
Solid State Ionics, Elsevier, 2006, 177, pp.3009. ⟨10.1016/j.ssi.2006.07.052⟩
5 pages; International audience; In this work, porous silicate glasses were mixed with an ionic conductor AgI to obtain SiO2/AgI composites. The porous glasses were either commercial Vycor glass (VPG) from Corning or synthesised from phase separated
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c6e2db6dca20d7983026c2e73386b282
https://doi.org/10.1016/j.ssi.2006.07.052
https://doi.org/10.1016/j.ssi.2006.07.052
Autor:
Micaël Charbonneau, Delphine Boutry, Barbara De Salvo, Nathalie Frolet, Denis Mariolle, Raluca Tiron, Julien Buckley, R. Coppard
Publikováno v:
MRS Proceedings. 1430
In this paper, we have performed further investigations and deepened our understanding of Polymer Resistive Random Access Memory devices (PoRRAM) on silicon substrate. Organic thin films based on blend of fullerene (C60) molecules and poly-methyl-met
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c73c518da558a35e898003a5a63de226
https://doi.org/10.1557/opl.2012.1121
https://doi.org/10.1557/opl.2012.1121