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Autor:
V. A. Armbrister, Vladimir Zinovyev, A. V. Dvurechenskii, P. A. Kuchinskaya, P. L. Novikov, V. A. Seleznev, Zhanna Smagina, Natalya Stepina
Publikováno v:
physica status solidi (a). 210:1522-1524
Experimental study of Ge nanoislands growth on groove-patterned Si(001) substrate formed by ion-beam-assisted nanoimprint lithography is carried out. Prepatterning procedure includes ion irradiation of Si substrate through imprinted resist mask and s