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pro vyhledávání: '"Naruto Fuwa"'
Autor:
Takashi Fukazawa, Hirofumi Suzuki, Osamu Horiuchi, Naruto Fuwa, Junichi Ikeno, Hideo Shibutanic
Publikováno v:
Initiatives of Precision Engineering at the Beginning of a Millennium ISBN: 9780792374145
This paper deals with mirror grinding of silicon wafers using EPD pellets of silica aggregate grains. The EPD pellets were fabricated by using electrophoretic deposition phenomenon. Mirror surfaces without scratch marks can be obtained by grinding wi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b7645c15281ca95aadbd7ddc9208af9c
https://doi.org/10.1007/0-306-47000-4_71
https://doi.org/10.1007/0-306-47000-4_71
Publikováno v:
The proceedings of the JSME annual meeting. :21-22
Publikováno v:
The Proceedings of The Manufacturing & Machine Tool Conference. :281-282
Autor:
Ichiro Inasaki
Faced with ever-increasing market demands, manufacturing industry is forced to seek innovation and technological breakthrough. This state-of-the-art text aims to integrate broad aspects of precision and production engineering to cope with rapid chang