Color mixing in overlay metrology for greater accuracy and robustness

Autor: Narjes Javaheri, John Lin, Benny Gosali, Antonios Zagaris, Ken Chang, Eason Su, Cathy Wang, Murat Bozkurt, Guo-Tsai Huang, Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Kai-Hsiung Chen, Marc Noot, Kaustuve Bhattacharyya, Reza Hajiahmadi

Publikováno v: Metrology, Inspection, and Process Control for Microlithography XXXIII.

The on-product overlay roadmap demands an aggressive overlay requirement in the advanced node. Currently the on-product overlay is dominated by effects coming from wafer processing and overlay target detectability. Processing effects such as symmetri

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::fb515be9ff892937a282a1198ad851c8
https://doi.org/10.1117/12.2514949

Understanding the Sub-Cellular Dynamics of Silicon Transportation and Synthesis in Diatoms Using Population-Level Data and Computational Optimization

Autor: Roland M. Dries, Jaap A. Kaandorp, Narjes Javaheri

Publikováno v: PLoS Computational Biology, 10(6):e1003687. Public Library of Science
PLoS Computational Biology, Vol 10, Iss 6, p e1003687 (2014)
PLoS Computational Biology

Controlled synthesis of silicon is a major challenge in nanotechnology and material science. Diatoms, the unicellular algae, are an inspiring example of silica biosynthesis, producing complex and delicate nano-structures. This happens in several cell

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f4f8eeaeeddf705ef15734f62c9fb695
https://dare.uva.nl/personal/pure/en/publications/understanding-the-subcellular-dynamics-of-silicon-transportation-and-synthesis-in-diatoms-using-populationlevel-data-and-computational-optimization(635f08ef-1750-4c79-ab99-4d1dcefb9f35).html