Zobrazeno 1 - 10
of 12
pro vyhledávání: '"Naoyuki Handa"'
Autor:
Shohei Shima, Akira Fukunaga, Ayako Yano, Naoyuki Handa, Kazuki Matsumoto, Hirokuni Hiyama, Kenji Amagai
Publikováno v:
Journal of the Japan Society for Precision Engineering. 86:65-70
Publikováno v:
ECS Journal of Solid State Science and Technology. 10:044002
Adhesive particles on polished wafers are detached via, for example, scrubbing, and removed via liquid flow from the wafer while preventing readhesion by controlling the zeta potential. However, the effect of the zeta potential on the removal of deta
Autor:
Satomi Hamada, Hirokuni Hiyama, Kohei Sato, Ayako Yano, Yutaka Wada, Masayoshi Imai, Akira Fukunaga, Kenji Amagai, Naoyuki Handa
Publikováno v:
The Proceedings of Conference of Kanto Branch. :10A04
Publikováno v:
ECS Journal of Solid State Science and Technology. 9:064001
Autor:
Kenji Amagai, Satomi Hamada, Tsubasa Arai, Naoyuki Handa, Hirokuni Hiyama, Masayoshi Imai, Ayako Yano
Publikováno v:
The Proceedings of Conference of Kanto Branch. 2020:17E06
Autor:
Naoyuki Handa, Hirokuni Hiyama, Masayoshi Imai, Yutaka Wada, Hiroshi Sobukawa, Kenji Amagai, Satomi Hamada
Publikováno v:
2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM).
With the miniaturization of the semiconductor, the slurry size used in CMP process tends to become small, and it is demanded to clean wafer efficiently after CMP. Therefore characteristic of particle removal in the liquid flow on a rotating wafer is
Autor:
Naoyuki Handa, Akihiro Shimizu, Keisuke Takenaka, Jun-ichi Yoshida, Toshiyuki Itoh, Toshiki Nokami
Publikováno v:
Advanced materials (Deerfield Beach, Fla.). 29(41)
Liquid benzoquinone and naphthoquinone having diethylene glycol monomethyl ether groups are designed and synthesized as redox active materials that dissolve supporting electrolytes. The Li-ion batteries based on the liquid quinones using LiBF4 /PC sh
Publikováno v:
The Proceedings of Conference of Hokuriku-Shinetsu Branch. :L043
Autor:
Satomi Hamada, Masayoshi Imai, Hirokuni Hiyama, Kenji Amagai, Ryoto Seki, Naoyuki Handa, Ayako Yano
Publikováno v:
The Proceedings of Conference of Kanto Branch. :OS0104
Autor:
Hirokuni Hiyama, Satomi Hamada, Ayako Yano, Kenji Amagai, Naoyuki Handa, Masayoshi Imai, Ryota Koshino
Publikováno v:
The Proceedings of Conference of Kanto Branch. :OS0103