Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Naoya Uene"'
Publikováno v:
Journal of Fluid Science and Technology, Vol 15, Iss 1, Pp JFST0005-JFST0005 (2020)
We consider a Couette flow of a rarefied Ar gas with heat transfer between two wall surfaces and investigate the scattering behavior of gas molecules reflected either at a clean Pt surface or at a surface contaminated with adsorbates. Water molecules
Externí odkaz:
https://doaj.org/article/f9b7c2b0629e4b42864e218f831ff1ae
Publikováno v:
Crystal Growth & Design.
Publikováno v:
ECS Transactions. 98:177-184
SiGe thin films, such as hydrogenated amorphous silicon germanium (a-SiGe:H) and hydrogenated microcrystalline silicon germanium (μc-SiGe:H), are formed by plasma enhanced chemical vapor deposition (PECVD) methods from SiH4, GeH4, and H2. Thin film
Publikováno v:
2021 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD).
We simulated the growth of SiGe alloys by using reactive force-field (ReaxFF) molecular dynamics simulations in binary systems of SiH x and GeH x and identify the effect of gaseous species on the compositions and crystallinity in alloys. The composit
Publikováno v:
Computational Materials Science. 204:111193
Publikováno v:
2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD).
In order to form a SiGe thin film by chemical vapor deposition (CVD) with a suitable quality for advanced devices, the relationships between materials/process and structure/composition are needed to be clarified at the atomic level. We simulated SiGe
Publikováno v:
2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD).
We calculate a deposition process of hydrogenated amorphous silicon (a-Si:H) films on a silicon (100) substrate by reactive force-field molecular dynamics simulations. The influences of (a) substrate temperatures and (b) coverage of hydrogen atoms on
Publikováno v:
Journal of Fluid Science and Technology, Vol 15, Iss 1, Pp JFST0005-JFST0005 (2020)
We consider a Couette flow of a rarefied Ar gas with heat transfer between two wall surfaces and investigate the scattering behavior of gas molecules reflected either at a clean Pt surface or at a surface contaminated with adsorbates. Water molecules
Publikováno v:
The Proceedings of Mechanical Engineering Congress, Japan. 2019:J05411
Autor:
Hideki Takeuchi, Yasutaka Hayamizu, Shigeru Ohtsuka, Naoya Uene, Shinichi Morita, Takeshi Gonda, Kyoji Yamamoto
Publikováno v:
The Proceedings of Conference of Chugoku-Shikoku Branch. :707