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Publikováno v:
SHINKU. 42:275-278
We developed a new practical thermistor-bolometer type infrared (IR) sensor using a chromium nitride (CrNx) thin film. CrNx thin films were prepared by reactive RF magnetron sputtering method. Temperature coefficients of resistance (TCR) of the films
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7d2466947cd07831fb4c3997391af315
https://doi.org/10.3131/jvsj.42.275
https://doi.org/10.3131/jvsj.42.275
