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pro vyhledávání: '"Nanako Dei"'
Autor:
Takeo Nakano, Hyuga Taniguchi, Nanako Dei, Makoto Ozawa, Md. Suruz Mian, Kei Oya, Katsuhisa Murakami, Masayoshi Nagao
Publikováno v:
Journal of Vacuum Science & Technology B. 40:063201
Spindt-type emitters were fabricated with cavities made of Al/Mo/SiO2 using the triode high power pulsed magnetron sputtering method. We explored the process parameters (gas pressure and voltage of the additional cap electrode) to optimize the sharpn
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5f59e17084ed4c879251a8f663411a99
https://doi.org/10.1116/6.0002201
https://doi.org/10.1116/6.0002201
