Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Namyoon Kim"'
Publikováno v:
Journal of Electromagnetic Engineering and Science, Vol 19, Iss 4, Pp 239-244 (2019)
Microwave-based wireless power transfer in the near field (up to about 10 m) is now drawing much interest since the transfer range when using current magnetic induction or magnetic resonance methods is limited in current industry. The Friis efficienc
Externí odkaz:
https://doaj.org/article/53b8362c7d87442687d57d748f1b5565
Publikováno v:
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5ea68bc5c393e4d3ca1fe44e2422bc4e
https://doi.org/10.1109/edtm55494.2023.10103078
https://doi.org/10.1109/edtm55494.2023.10103078
Publikováno v:
Applied Optical Metrology IV.
An innovative self-interferometric pupil ellipsometry(SIPE) has been demonstrated to overcome the spectral sensitivity and throughput limitations for optical critical dimensions (OCD) metrology in the advanced semiconductor devices. The two orthogona
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6345540a287764f31fb2b94ca50dd609
https://doi.org/10.1117/12.2593375
https://doi.org/10.1117/12.2593375
Publikováno v:
Journal of Electromagnetic Engineering and Science, Vol 19, Iss 4, Pp 239-244 (2019)
Microwave-based wireless power transfer in the near field (up to about 10 m) is now drawing much interest since the transfer range when using current magnetic induction or magnetic resonance methods is limited in current industry. The Friis efficienc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0af494f08fc2d09d8ca83cee0bbcc46c
https://doi.org/10.26866/jees.2019.19.4.239
https://doi.org/10.26866/jees.2019.19.4.239
Autor:
Namyoon Kim, Soonyang Kwon
Publikováno v:
Applied Optics. 60:9311
White-light phase-shifting interferometry (WLPSI) is widely used for obtaining surface profiles of inspection targets in liquid-crystal displays (LCD) and semiconductor manufacturing processes. Phase errors caused by irregular and nonlinear scanner m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::69e0556c248db6b0f89861370cc18ffb
https://doi.org/10.1364/ao.437533
https://doi.org/10.1364/ao.437533
Publikováno v:
Journal of Electronic Materials. 44:792-796
We describe an optical three dimensional (3D) measurement method using white-light dispersive interferometry in the range of 5 μm–150 μm. A spectrometer was employed for real-time wavelength scanning and the distance information was obtained usin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fd4717b93ef6901c9f214acbbc0ba0f6
https://doi.org/10.1007/s11664-014-3524-4
https://doi.org/10.1007/s11664-014-3524-4
Publikováno v:
OPTICS EXPRESS(22): 14
An optical microscopy system as a non-destructive method for measuring critical dimension (CD) is widely used for its stability and fastness. In case of transparent thin film measurement, it is hard to recognize the pattern under white light illumina
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d18b33a51a03a80221950072d5e816a5
http://open-repository.kisti.re.kr/cube/handle/open_repository/476672.do
http://open-repository.kisti.re.kr/cube/handle/open_repository/476672.do
