Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Namwook Hur"'
Autor:
Jeongwon Park, Seung Jae Kwak, Sumin Kang, Saeyoung Oh, Bongki Shin, Gichang Noh, Tae Soo Kim, Changhwan Kim, Hyeonbin Park, Seung Hoon Oh, Woojin Kang, Namwook Hur, Hyun-Jun Chai, Minsoo Kang, Seongdae Kwon, Jaehyun Lee, Yongjoon Lee, Eoram Moon, Chuqiao Shi, Jun Lou, Won Bo Lee, Joon Young Kwak, Heejun Yang, Taek-Mo Chung, Taeyong Eom, Joonki Suh, Yimo Han, Hu Young Jeong, YongJoo Kim, Kibum Kang
Publikováno v:
Nature Communications, Vol 15, Iss 1, Pp 1-11 (2024)
Abstract The advanced patterning process is the basis of integration technology to realize the development of next-generation high-speed, low-power consumption devices. Recently, area-selective atomic layer deposition (AS-ALD), which allows the direc
Externí odkaz:
https://doaj.org/article/55b0b490549943fb9f81834d5ed9a8de
Publikováno v:
Journal of Applied Physics. 129:050903
Phase-change memory (PCM), a non-volatile memory technology, is considered the most promising candidate for storage class memory and neuro-inspired devices. It is generally fabricated based on GeTe–Sb2Te3 pseudo-binary alloys. However, natively, it
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::424a5e262f6f68d1755cfd222ffd791d
https://doi.org/10.1063/5.0031947
https://doi.org/10.1063/5.0031947