Zobrazeno 1 - 2
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pro vyhledávání: '"Namie, Masamune"'
Publikováno v:
神奈川工科大学研究報告.B,理工学編. 33:43-46
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MgO thin films have been deposited on quartz glass substrates by RF magnetron sputtering using a MgO target in Ar/O2 mixture gas. The films were evaluated using scanning electron microscope (SEM) and energy dispersive X-ray spect
MgO thin films have been deposited on quartz glass substrates by RF magnetron sputtering using a MgO target in Ar/O2 mixture gas. The films were evaluated using scanning electron microscope (SEM) and energy dispersive X-ray spect
Publikováno v:
神奈川工科大学研究報告.B,理工学編. 35:37-39
application/pdf
MgO thin films were prepared on quartz glass substrates by RF magnetron sputtering using a MgO target. The secondary electron emission coefficient for MgO thin films was examined in relation to substrate temperature and film thic
MgO thin films were prepared on quartz glass substrates by RF magnetron sputtering using a MgO target. The secondary electron emission coefficient for MgO thin films was examined in relation to substrate temperature and film thic