Zobrazeno 1 - 10
of 46
pro vyhledávání: '"Nam-Yeal Lee"'
Bias polarity and frequency effects of Cu-induced dielectric breakdown in damascene Cu interconnects
Autor:
Sung-Yup Jung, Noh Jung Kwak, Baek-Mann Kim, Byoung-Joon Kim, Young-Chang Joo, Seung Jin Yeom, Nam Yeal Lee
Publikováno v:
Microelectronic Engineering. 89:58-61
Cu-ion-migration-induced dielectric breakdown in damascene Cu interconnect was studied in alternating polarity-bias conditions using a metal-insulator-semiconductor (MIS) structured sample and a damascene Cu interconnect sample. Compared to a direct-
Autor:
Tae-Jin Park, Byoung-Gon Yu, Young Sam Park, Kyu-Jeong Choi, Sung-Min Yoon, Seung-Yun Lee, Nam-Yeal Lee, Se-Young Choi
Publikováno v:
Integrated Ferroelectrics. 93:83-89
For the realization of reliable nonvolatile phase-change memory operations, it is very important to understand the long-term behaviors of memory states with different resistance values. We investigated the time-dependent behaviors of RESET resistance
Publikováno v:
Japanese Journal of Applied Physics. 46:7225-7231
We modified the composition of Ge–Sb–Te alloys for phase-change-type nonvolatile memory devices to realize more reliable memory operations. It is expected that the stability of the low-resistance crystalline phase of the Ge–Sb–Te alloy can be
Publikováno v:
Applied Surface Science. 254:316-320
In this study, a phase-change memory device was fabricated and the origin of device failure mode was examined using transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy (EDS). Ge2Sb2Te5 (GST) was used as the active phase-ch
Autor:
Byoung-Gon Yu, Kyu-Jeong Choi, Young Sam Park, Seung-Yun Lee, Nam-Yeal Lee, Sang-Ouk Ryu, Sung-Min Yoon, Sang-Heung Lee, Sanghoon Kim
Publikováno v:
Applied Surface Science. 254:312-315
The effect of the electrical resistivity of a silicon–germanium (SiGe) thin film on the phase transition in a GeSbTe (GST) chalcogenide alloy and the manufacturing aspect of the fabrication process of a chalcogenide memory device employing the SiGe
Publikováno v:
Japanese Journal of Applied Physics. 46:L99-L102
For the realization of highly reliable phase-change memory devices, it is very important to understand their operational failure modes. We presented the failure behavior of devices using Ge2Sb2Te5 (GST) as a phase-change material, in which the drift
Autor:
Kyu Jeong Choi, Dae-Hyun Kim, Byoung Gon Yu, Se-Young Choi, Nam Yeal Lee, Sung Min Yoon, Tae Jin Park
Publikováno v:
Japanese Journal of Applied Physics. 45:L1273-L1276
Sn was employed in Ge2Sb2Te5 to accelerate operation speed of phase change random access memory (PRAM). Crystallized Sn-doped Ge2Sb2Te5 showed face centered cubic (fcc) or hexagonal close packed (hcp) structures upon heat treatment, which was similar
Publikováno v:
Japanese Journal of Applied Physics. 45:L1080-L1083
We investigated dry etching methods for the patterning of nanosized Ge2Sb2Te5 (GST) patterns using high-density helicon plasma etching system. It was found that GST patterns of 10-nm-order size could not be formed in a suitable way owing to the damag
Publikováno v:
Thin Solid Films. 484:374-378
The effect of switching characteristics on the ferroelectric fatigue behaviors of the La-substituted Bi 4 Ti 3 O 12 (BLTO) capacitors were investigated. The parameter of switching time ( t s ) for the fabricated BLTO capacitor was found to be depende
Autor:
Woong-Chul Shin, G. X. Liu, Il-Soo Kim, Won-Jae Lee, Nam-Yeal Lee, Sang-Ouk Ryu, Geun-Hyoung Lee, Byoung-Chul Shin
Publikováno v:
Integrated Ferroelectrics. 70:123-130
The phase formation and electrical properties of (Bi,La)4Ti3O12 (BLT) thin film prepared by the chemical solution deposition method on Pt/TiO2/SiO2/Si substrates have been investigated. It was observed that the microstructure and electrical propertie