Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Nam, Hyoung Gin"'
Publikováno v:
In Thin Solid Films 1 January 2013 527:334-337
Autor:
Nam, Hyoung Gin *, Koo, Kyoung-Hwan
Publikováno v:
In Thin Solid Films 2000 379(1):101-106
Growth of very low temperature polysilicon film by remote plasma-enhanced chemical-vapor deposition.
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1997, Vol. 15 Issue 4, p1819-1823, 5p
Publikováno v:
Japanese Journal of Applied Physics; June 1996, Vol. 35 Issue: 6 pL695-L695, 1p
Publikováno v:
Japanese Journal of Applied Physics; July 1998, Vol. 37 Issue: 7 p4041-4041, 1p