Zobrazeno 1 - 10
of 38
pro vyhledávání: '"Nadir S. Faradzhev"'
Publikováno v:
Surface and Interface Analysis. 49:1187-1205
We discuss the problem of quantifying common sources of statistical uncertainties for analyses of trace levels of surface contamination using X-ray photoelectron spectroscopy. We examine the propagation of error for peak-area measurements using commo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::766d3d2a95601cd3cc5a6b365279d91e
https://doi.org/10.1002/sia.6285
https://doi.org/10.1002/sia.6285
Publikováno v:
Surface and Interface Analysis. 49:1214-1224
We discuss analyses of trace levels of surface contamination using X-ray photoelectron spectroscopy (XPS). The problem of quantifying common sources of statistical and systematic uncertainties for these measurements is formulated in terms of the need
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::df02915793d1489ce8409c6699b69963
https://doi.org/10.1002/sia.6289
https://doi.org/10.1002/sia.6289
Autor:
Shannon B. Hill, Nadir S. Faradzhev
Publikováno v:
Surface Science. 652:200-205
Previously we reported estimates of the maximum etch rates of C on TiO2 by oxidizers including NO, O3 and H2O2 when irradiated by a spatially-non-uniform beam of extreme ultraviolet (EUV) radiation at 13.5 nm (Faradzhev et al., 2013). Here we extend
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::605d17105cc9e22ec0f9a735972d51ce
https://doi.org/10.1016/j.susc.2016.03.025
https://doi.org/10.1016/j.susc.2016.03.025
Publikováno v:
The Journal of Physical Chemistry C. 117:23072-23081
We report the photodeposition of a carbonaceous layer grown on a TiO2 thin film by extreme ultraviolet (EUV)-induced chemistry of adsorbed n-tetradecane and the subsequent photo-oxidation of this film. Chemical analysis of the carbonaceous layer indi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c8781ba36aeb3389e34a76e8c524cb41
https://doi.org/10.1021/jp4091427
https://doi.org/10.1021/jp4091427
Autor:
Nadir S, Faradzhev, Shannon B, Hill
Publikováno v:
Surface science. 652
Previously we reported estimates of the maximum etch rates of C on TiO2 by oxidizers including NO, O3 and H2O2 when irradiated by a spatially-non-uniform beam of extreme ultraviolet (EUV) radiation at 13.5 nm (Faradzhev et al., 2013). Here we extend
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::e583f08b14fd45239392e7e50e011afe
https://pubmed.ncbi.nlm.nih.gov/27458322
https://pubmed.ncbi.nlm.nih.gov/27458322
Autor:
Thomas B. Lucatorto, B. V. Yakshinskii, Theodore E. Madey, Shannon B. Hill, Nadir S. Faradzhev
Publikováno v:
Bulletin of the Russian Academy of Sciences: Physics. 74:28-32
In this paper we discuss surface phenomena leading to contamination of multilayer optics designed for Extreme Ultraviolet (EUV) lithography. Experimental data supported by calculations indicate dramatic influence of resonance structure of EUV mirror
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1c3b94f04202fcb42faed6a7893a43ce
https://doi.org/10.3103/s1062873810010089
https://doi.org/10.3103/s1062873810010089
Autor:
Nadir S. Faradzhev, Vadim Sidorkin
Publikováno v:
Journal of Vacuum Science & Technology A, 27 (2), 2009
The authors report on the interaction of atomic hydrogen with Sn and thin Ru film at room temperature. The study is done using a combination of photoelectron and low energy ion scattering spectroscopies as well as scanning electron microscopy. The ad
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8aa6c3d83d71c65facc8e4db365ef233
https://doi.org/10.1116/1.3081968
https://doi.org/10.1116/1.3081968
Publikováno v:
Applied Surface Science. 253:1691-1708
One of the most promising methods for next generation device manufacturing is extreme ultraviolet (EUV) lithography, which uses 13.5 nm wavelength radiation generated from freestanding plasma-based sources. The short wavelength of the incident illumi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::19c89dc0b69bfaa65b4c49f300f79953
https://doi.org/10.1016/j.apsusc.2006.04.065
https://doi.org/10.1016/j.apsusc.2006.04.065
Publikováno v:
Chemical Physics Letters. 415:165-171
To clarify conflicting reports on the composition and stability of H2O and D2O adsorbates on Ru(0 0 0 1), we have conducted correlated experiments in two laboratories using X-ray photoelectron spectroscopy and thermal desorption spectroscopy, without
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::96f3697621c4fcbee139f89a6025d6f7
https://doi.org/10.1016/j.cplett.2005.08.119
https://doi.org/10.1016/j.cplett.2005.08.119
Publikováno v:
International Reviews in Physical Chemistry. 23:289-340
The focus of this review is the effect of H2O on the electron-driven chemistry of condensed halogenated compounds. We present data with emphasis on results from the authors’ laboratories for halomethanes (CF2Cl2, CCl4, CH3I, CDCl3, CD2Cl2) and SF6.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4617395a361c8c1cee242414ef722175
https://doi.org/10.1080/01442350412331284625
https://doi.org/10.1080/01442350412331284625