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pro vyhledávání: '"Nader Jamshidi"'
Autor:
Chong-Jer Liaw, Joesph Michael Brennan, Ady Hershcovitch, Michael Blaskiewicz, Nader Jamshidi, Wolfram Fischer, Robert Todd, H. J. Poole, Mark R. Erickson, Wuzhang Meng, Art Custer, Aaron L. Dingus
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 33:052601
Devices and techniques that can, via physical vapor deposition, coat various surface contours or very long small aperture pipes, are described. Recently, a magnetron mole was developed in order to in-situ coat accelerator tube sections of the Brookha