Zobrazeno 1 - 10
of 36
pro vyhledávání: '"Nabil Laachi"'
Publikováno v:
Journal of Computational Physics. 375:1159-1178
We introduce a level-set strategy to find the geometry of confinement that will guide the self-assembly of block copolymers to a given target design in the context of lithography. The methodology is based on a shape optimization algorithm, where the
Autor:
Glenn H. Fredrickson, Gaddiel Ouaknin, Daniil Bochkov, Frederic Gibou, Kris T. Delaney, Nabil Laachi
Publikováno v:
Journal of Computational Physics. 345:207-223
We derive functional level-set derivatives for the Hamiltonian arising in self-consistent field theory, which are required to solve free boundary problems in the self-assembly of polymeric systems such as block copolymer melts. In particular, we cons
Publikováno v:
Journal of Computational Physics. 327:168-185
We introduce a framework for simulating the mesoscale self-assembly of block copolymers in arbitrary confined geometries subject to Neumann boundary conditions. We employ a hybrid finite difference/volume approach to discretize the mean-field equatio
Autor:
Glenn H. Fredrickson, Tatsuhiro Iwama, Michael Carilli, Kris T. Delaney, Nabil Laachi, Bongkeun Kim
Publikováno v:
Macromolecules. 48:1256-1261
We use self-consistent field theory to investigate the directed self-assembly of cylinder-forming block copolymers for the purpose of a graphoepitaxial pitch multiplication. We focus in particular on conditions where two minor-block cylinders form in
Publikováno v:
ResearcherID
Publikováno v:
Macromolecules. 47:8819-8823
The directed self-assembly (DSA) of block copolymers offers an attractive route to produce one-dimensional rows of cylindrical ∼10 nm scale contact holes for lithography. The success of DSA as a viable lithography technique hinges however on the ab
Autor:
Kris T. Delaney, Corey J. Weinheimer, Nabil Laachi, Tatsuhiro Iwama, Glenn H. Fredrickson, David Shykind
Publikováno v:
Journal of Polymer Science Part B: Polymer Physics. 53:317-326
Autor:
Glenn H. Fredrickson, Corey J. Weinheimer, Kris T. Delaney, Robert L. Bristol, David Shykind, Tatsuhiro Iwama, Nabil Laachi
Publikováno v:
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Autor:
David Shykind, Kris T. Delaney, Bongkeun Kim, Curey J. Weinheimer, Glenn H. Fredrickson, Tatsuhiro Iwama, Nabil Laachi, Robert L. Bristol, Sun-MI Hur
Publikováno v:
Journal of Photopolymer Science and Technology. 26:15-20
Publikováno v:
SPIE Proceedings.
Directed self-assembly using block copolymers for positioning vertical interconnect access in integrated circuits relies on the proper shape of a confined domain in which polymers will self-assemble into the targeted design. Finding that shape, i.e.,