Zobrazeno 1 - 7
of 7
pro vyhledávání: '"N.V. Cherkesova"'
Publikováno v:
Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов, Iss 15, Pp 1070-1079 (2023)
The processes occurring in the silicon-oxygen-nitrogen system are of great practical importance, since dielectric layers made from materials of this system are widely used as barriers to the penetration of impurities, elements of storage capacitors,
Externí odkaz:
https://doaj.org/article/f9aa14d19f9f43f0a3d0e514c8581282
Publikováno v:
Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов, Iss 13, Pp 329-337 (2021)
Metal-insulator-semiconductor (MIS) structures are key elements of modern electronic technology, including devices operating under conditions of exposure to penetrating radiation. One of the possible approaches to reducing radiation effects in MIS st
Externí odkaz:
https://doaj.org/article/25ebff49603849a8b221d4b3122ec3d9
Publikováno v:
Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов, Iss 12, Pp 662-671 (2020)
The high energy consumption of integrated electronics products and expensive methods of their production makes scaling silicon semiconductor devices to sizes less than 50 nm a difficult technological and design task. Recently, significant advances ha
Externí odkaz:
https://doaj.org/article/6b51b5622977439688ec602c19a0028e
Publikováno v:
Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов, Iss 12, Pp 868-874 (2020)
Ion implantation with recoil ions or ion mixing based on the introduction of the required impurity from the surface layers during the transfer of the kinetic energy of the primary beam to them have great prospects for obtaining structures and compoun
Externí odkaz:
https://doaj.org/article/bfc4f4264b1e455db8a799c3d2347684
Publikováno v:
Proceedings of the International Symposium "Engineering and Earth Sciences: Applied and Fundamental Research" dedicated to the 85th anniversary of H.I. Ibragimov (ISEES 2019).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::61d535ebfe083e1ee83af8f27294c8f8
https://doi.org/10.2991/isees-19.2019.157
https://doi.org/10.2991/isees-19.2019.157
Publikováno v:
Proceedings of the International Symposium "Engineering and Earth Sciences: Applied and Fundamental Research" dedicated to the 85th anniversary of H.I. Ibragimov (ISEES 2019).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::88eb8c6da9fd6ee5777e41c3146ffea7
https://doi.org/10.2991/isees-19.2019.158
https://doi.org/10.2991/isees-19.2019.158
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