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pro vyhledávání: '"N.S. Pankova"'
Publikováno v:
Proceedings of Higher Educational Institutions. Маchine Building. :18-27
The thickness of thin films determines the films’ unique properties, due to which they are widely used in optics and electronics. To measure the thickness of films in the range of 1 nm — 1 mcm during film deposition or on a finished product, it i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1fe24c2dc531e17e44536852260e9e09
https://doi.org/10.18698/0536-1044-2019-4-18-27
https://doi.org/10.18698/0536-1044-2019-4-18-27
Publikováno v:
Proceedings of Higher Educational Institutions. Маchine Building. :31-39
Thin film technologies are widely used in science and industry and have a critical value for optics and electronics. Special properties of thin films are related to their thickness, usually ranging between 1 nm and 1 um. Measuring such a thickness is
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8e14488c1deedb81fa84078e5eb0f398
https://doi.org/10.18698/0536-1044-2019-3-31-39
https://doi.org/10.18698/0536-1044-2019-3-31-39
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