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pro vyhledávání: '"N. Yu. Lyubovin"'
Autor:
N. Yu. Lyubovin, Andrey S. Baturin, Yu. Yu. Lebedinskii, V. N. Nevolin, Andrei Zenkevich, E. P. Sheshin
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 1:84-89
A complex approach to study the initial stage of degradation of hafnium oxide dielectric films during vacuum thermal annealing up to T = 900°C is proposed. Spreading resistance, Kelvin probe, and force modulation methods are used in addition to surf
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::76b362c3541202bc68a71651eb9a858f
https://doi.org/10.1134/s102745100701017x
https://doi.org/10.1134/s102745100701017x
Publikováno v:
Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques; Feb2007, Vol. 1 Issue 1, p84-89, 6p