Zobrazeno 1 - 2
of 2
pro vyhledávání: '"N. V. Leonovich"'
Publikováno v:
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 21, Iss 4, Pp 33-39 (2023)
A developed technological reactor for the formation of a diamond-like carbon coating on substrates up to 200 mm in diameter by chemical vapor deposition in high-density inductively coupled plasma at an operating pressure below 5 Pa is described. The
Externí odkaz:
https://doaj.org/article/2cea37e7c2274ea18c4ba64b2be50d88
Autor:
A D, Baryshnikova, N V, Leonovich
Publikováno v:
Khirurgiia. 46(2)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::c7574a21b1510a40d67311e96a06118e
https://pubmed.ncbi.nlm.nih.gov/4985927
https://pubmed.ncbi.nlm.nih.gov/4985927