Zobrazeno 1 - 3
of 3
pro vyhledávání: '"N. V. Leonovich"'
Publikováno v:
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 21, Iss 4, Pp 33-39 (2023)
A developed technological reactor for the formation of a diamond-like carbon coating on substrates up to 200 mm in diameter by chemical vapor deposition in high-density inductively coupled plasma at an operating pressure below 5 Pa is described. The
Externí odkaz:
https://doaj.org/article/2cea37e7c2274ea18c4ba64b2be50d88
Autor:
A D, Baryshnikova, N V, Leonovich
Publikováno v:
Khirurgiia. 46(2)
Publikováno v:
Geomagnetism & Aeronomy; Sep2016, Vol. 56 Issue 5, p557-571, 15p