Zobrazeno 1 - 8
of 8
pro vyhledávání: '"N. R. Tas"'
Autor:
L Capuano, J W Berenschot, R M Tiggelaar, M Feinaeugle, N R Tas, J G E Gardeniers, G R B E Römer
Publikováno v:
Journal of micromechanics and microengineering, 32(12):125003. Institute of Physics (IOP)
In this paper a processing technique for sapphire is presented which combines laser-induced amorphization and subsequent selective wet etching of amorphized sapphire as well as anisotropic wet etching of single-crystalline sapphire (α-Al2O3). Using
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d82b62baff5e9d61c8edbf4ab4207a34
https://doi.org/10.1088/1361-6439/ac9911
https://doi.org/10.1088/1361-6439/ac9911
Autor:
J G E Wilbers, J W Berenschot, R M Tiggelaar, T Dogan, K Sugimura, W G van der Wiel, J G E Gardeniers, N R Tas
Publikováno v:
Journal of Micromechanics & Microengineering; Apr2018, Vol. 28 Issue 4, p1-1, 1p
Sidewall patterning—a new wafer-scale method for accurate patterning of vertical silicon structures.
Publikováno v:
Journal of Micromechanics & Microengineering; Jan2018, Vol. 28 Issue 1, p1-1, 1p
Autor:
K. M. van Delft, J. C. T. Eijkel, D. Mijatovic, T. S. Druzhinina, H. Rathgen, N. R. Tas, A. van den Berg, F. Mugele
Publikováno v:
Nano Letters; Aug2009, Vol. 9 Issue 8, p3087-3088, 2p
Publikováno v:
Journal of Micromechanics & Microengineering; Oct2014, Vol. 24 Issue 10, p1-1, 1p
Publikováno v:
Nanotechnology; Jul2011, Vol. 22 Issue 27, p275201-275201, 1p
Publikováno v:
Nanotechnology; Nov2009, Vol. 20 Issue 47, p475302-475302, 1p
Autor:
S Unnikrishnan, H V Jansen, F H Falke, N R Tas, H A G M, Van Wolferen, M J De, R G P Sanders, M C Elwenspoek
Publikováno v:
Nanotechnology; Jul2009, Vol. 20 Issue 30, p305304-305304, 1p