Zobrazeno 1 - 2
of 2
pro vyhledávání: '"N. N. Moskovchenko"'
Autor:
O. S. Kondratenko, L. M. Kapitanchuk, A. M. Svetlichnyi, N. N. Moskovchenko, Yu. Yu. Bacherikov, N.L. Dmitruk, O. B. Okhrimenko, R. V. Konakova, V. V. Milenin
Publikováno v:
Technical Physics. 53:1232-1235
The influence of rapid thermal annealing (RTA) on the properties of a titanium film on the surface of porous silicon carbide is considered. It is shown that an increase in the RTA temperature to 900°C stabilizes the phase composition of the forming
Autor:
N. N. Moskovchenko, R. V. Konakova, Yu. Yu. Bacherikov, O. S. Lytvyn, A. M. Svetlichnyi, O. B. Okhrimenko
Publikováno v:
Technical Physics Letters. 32:140-142
The effect of rapid thermal annealing (RTA) in oxygen on the properties of titanium-doped porous silicon carbide (por-SiC) layers has been studied. The data on the surface morphology and the photoluminescence (PL) spectra show that the high-temperatu