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pro vyhledávání: '"N. M. Larionov"'
Publikováno v:
Kontrol'. Diagnostika. :24-29
The results of the assessment of the composition of emissions of pollutants during the process of epitaxy into the atmosphere are presented. Using the example of a typical model of the epitaxy process and instrumental measurements, it was found that
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d9e0aae434efe47248261ffbfebee885
https://doi.org/10.14489/td.2022.06.pp.024-029
https://doi.org/10.14489/td.2022.06.pp.024-029
