Výsledky vyhledávání - "N. L. Finnegan"

Surface roughness development during sputtering of GaAs and InP: Evidence for the role of surface diffusion in ripple formation and sputter cone development

Autor: N. L. Finnegan, C. M. Loxton, S. W. MacLaren, J. E. Baker

Publikováno v: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 10:468-476

Surface diffusion is shown to be the important factor in sputter–induced ripple and cone development on GaAs and InP surfaces for conditions typical of depth profiling when using surface analysis techniques. Ripple formation has been observed on bo

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ef8c2bf30df41882fe2392af50716a3e
https://doi.org/10.1116/1.578173

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