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pro vyhledávání: '"N. Iwamotoa"'
Publikováno v:
2007 International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems. EuroSime 2007.
The invention of inorganic bottom anti-reflective coatings (BARCs) was a promising enabling technology for lithography due to their near unity plasma etch selectivities with the low-k dielectric materials used in advanced via first trench last (VFTL)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3a0af4068d987f2cdb0eaec80ae4c616
https://doi.org/10.1109/esime.2007.360049
https://doi.org/10.1109/esime.2007.360049
