Zobrazeno 1 - 3
of 3
pro vyhledávání: '"N. G. Mironnikov"'
Publikováno v:
Optoelectronics, Instrumentation and Data Processing. 53:466-473
This paper describes a study of the optical methods for fabrication of multilevel profile in the layers of a Hybrimer-TATS hybrid photopolymer material based on thiol-siloxane and acrylate oligomers. Grayscale photolithography and direct laser writin
Autor:
D. I. Derevyanko, Vladimir V. Shelkovnikov, A. Yu. Zhizhchenko, N. G. Mironnikov, Victor P. Korolkov, O. B. Vitrick
Publikováno v:
Optoelectronics, Instrumentation and Data Processing. 52:180-186
Optical (refractive index and absorption coefficient) and thermo-optical (linear thermal expansion and thermo-optic coefficients) characteristics of a new hybrid organic-inorganic photopolymer material “Hybrimer-TATS” based on thiol-siloxane and
Publikováno v:
Computer Optics. 40:482-488
A process of manufacturing conformal correctors for solid state YAG:Nd3+ lasers is discussed. It is proposed that a maskless lithography method should be used for fabricating a photoresist film with a desired thickness profile as an alternative to th