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pro vyhledávání: '"N. G. Borzyak"'
Autor:
N. G. Borzyak, F. F. Kolpakov
Publikováno v:
Radioelectronics and Communications Systems. 51:256-261
A dynamic model of the microelectromechanical (MEMS) capacitor with electrostatic control has been proposed. This model is based on the A.A. Kharkevich multisided transducer theory with due regard for the thermal impact. A two-electrode capacitive ME
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::687267a8b87b2ef7c2d5f7da3ffed323
https://doi.org/10.3103/s073527270805004x
https://doi.org/10.3103/s073527270805004x
