Zobrazeno 1 - 2
of 2
pro vyhledávání: '"N. F. M. Lazim"'
Publikováno v:
2022 IEEE 13th Control and System Graduate Research Colloquium (ICSGRC).
Publikováno v:
AIP Conference Proceedings.
This paper reports on the optimization of fabrication process of PZT thin film capacitor for monolithic microwave integrated circuit (MMIC) applications. PZT thin film is used as a dielectric in the capacitor design with the aim to achieve miniaturiz