Zobrazeno 1 - 10
of 16
pro vyhledávání: '"N P Poluektov"'
Autor:
N. P. Poluektov, Yu. P. Tsargorodtsev, E. P. Kozlovskaya, A. G. Evstigneev, O. O. Amel'kin, I. I. Usatov
Publikováno v:
Plasma Physics Reports. 45:592-601
The ionization region of a hollow-cathode magnetron discharge was studied experimentally. The discharge was powered by either a dc supply or a high-power pulsed supply. The emission spectra of atoms and ions of the target material and buffer gas were
Publikováno v:
Plasma Physics Reports. 40:754-759
Results from studies of the parameters of a novel type of plasma source—a hollow cathode magnetron—are presented. The magnetron operates at a gas pressure of 5–20 mTorr, the discharge power being in the range of 0.5–4 kW. At discharge powers
Publikováno v:
Journal of Modern Physics. :1494-1502
This paper deals with the characterization of an ionized physical vapor deposition (IPVD) by means of hollow cathode magnetron. Langmuir probe, optical emission spectroscopy measurements were used to study a mechanism for the production of excited ar
Autor:
Alexander M. Popov, N. P. Poluektov, E. A. Volkova, M. V. Fedorov, Olga V. Tikhonova, V. Y. Kharin
Publikováno v:
IEEE Journal of Selected Topics in Quantum Electronics. 18:42-53
Interference stabilization of Rydberg atoms in a sufficiently strong laser field is revisited. Its main features predicted theoretically and observed experimentally are described together with the newest experimental and theoretical results. The most
Autor:
N. P. Poluektov, E. P. Kozlovskay, I. I. Usatov, A. G. Evstigneev, O. O. Amel'kin, Yu P. Tsar'gorodsev
Publikováno v:
Journal of Physics: Conference Series. 1121:012024
Publikováno v:
Plasma Sources Science and Technology. 12:449-453
The transverse temperature of sputtered aluminium atoms in an electron cyclotron resonance discharge has been calculated from the shapes of their Doppler broadening emission lines, which were measured with a pressure scanning Fabry–Perot interferom
Publikováno v:
Plasma Physics Reports. 27:625-633
The ionization of sputtered aluminum atoms in the plasma of a microwave ECR discharge intended for metal coating of submicron-size structures in microelectronics is studied. The spatial distributions of xenon plasma parameters and their variations un
Autor:
N P Efremov, N P Poluektov
Publikováno v:
Journal of Physics D: Applied Physics. 31:988-995
Tomographic equations for the velocity and temperature of heavy particles in plasma have been derived using the relations of the velocity distributions with the Doppler shift and broadening of the spectral lines. These equations are correct for non-M
Publikováno v:
Experimental Thermal and Fluid Science. 3:567-573
The characteristics of plasmas of hydrogen, helium, and argon, rotating in crossed fields of up to 80 kV/m and 0.8 T under a pulsed discharge in the stage of acceleration at powers ranging from 2 to 8 MW and in the stage of electric energy generation