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Autor:
I A Sokolov, G K Zhanbolatova, Ye A Kozhahmetov, V V Baklanov, N A Orazgaliev, O S Bukina, M. K. Skakov
Publikováno v:
Journal of Physics: Conference Series. 2064:012055
This paper presents a method of tungsten surface carbidization using a plasma-beam setup to assess the effect of temperature on the formation of tungsten carbides. Methane was used as a plasma-forming gas. The working gas pressure in the chamber was