Zobrazeno 1 - 10
of 64
pro vyhledávání: '"N, Linhart"'
Autor:
Jason J. Keleher, Alexis D. Ostrowski, Amie E. Norton, Giuseppe E. Giammanco, M H Jayan S Karunarathna, Jackson J. Chory, Abigail N. Linhart
Publikováno v:
ACS Applied Bio Materials. 4:5765-5775
Coordination of Fe(III) to carboxylates in polyuronic acid hydrogels was used to impart photochemical reactivity to polysaccharide-based hydrogels. This photochemical reaction was then used for light-initiated polymerization to create hydrogels with
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::477130f1a84f2c40c538fb3e2101de85
https://doi.org/10.1021/acsabm.1c00525
https://doi.org/10.1021/acsabm.1c00525
Autor:
Jason J. Keleher, Allie M. Mikos, Katherine M. Wortman-Otto, Kiana A. Cahue, Abigail N. Linhart
Publikováno v:
Solid State Phenomena. 314:237-246
Due to the emergence of sub-7 nm technologies, next generation CMP slurry formulations have continued to increase in additive (nanoparticle and chemistry) complexity to meet stringent device specifications. Therefore, it is essential to probe the mol
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::20a993d10de5c3392201d5508e723084
https://doi.org/10.4028/www.scientific.net/ssp.314.237
https://doi.org/10.4028/www.scientific.net/ssp.314.237
Endomyocardial biopsy (EMB) is an invasive procedure, globally most often used for the monitoring of heart transplant rejection. In addition, EMB can have an important complementary role to the clinical assessment in establishing the diagnosis of div
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______2127::364a5851346fef831d799ec0dcac6086
https://pergamos.lib.uoa.gr/uoa/dl/object/uoadl:3029844
https://pergamos.lib.uoa.gr/uoa/dl/object/uoadl:3029844
Autor:
Jason J. Keleher, Kiana A. Cahue, Katherine M. Wortman-Otto, Abigail N. Linhart, Adam T Caridi, Abigail L. Dudek
Publikováno v:
ECS Meeting Abstracts. :655-655
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac0914d4c62b48e97823f653865f1856
https://doi.org/10.1149/ma2021-0214655mtgabs
https://doi.org/10.1149/ma2021-0214655mtgabs
Publikováno v:
ECS Journal of Solid State Science and Technology. 10:063001
As technology continues to expand beyond that predicted by Moore’s Law the need to alter chemical mechanical planarization (CMP) processes to meet consumer demands is critical. To achieve higher oxide material removal rates (MRR), slurry formulatio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8997c391a94b0982764c32f2a29b5d0e
https://doi.org/10.1149/2162-8777/ac040a
https://doi.org/10.1149/2162-8777/ac040a
Autor:
D. Tamboli, Wei-Tsu Tseng, Abigail N. Linhart, Jason J. Keleher, Katherine M. Wortman-Otto, Ara Philipossian, Yasa Sampurno
Publikováno v:
ECS Journal of Solid State Science and Technology. 10:064011
Results from a series of post-CMP PVA scrubbing marathon runs performed in a high-volume manufacturing fab are scientifically explained via a series of controlled laboratory tests. The major differences in the ingredients within the cleaning solution
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c8c924ecc58b87c4b567c5c666f848f0
https://doi.org/10.1149/2162-8777/ac0b8d
https://doi.org/10.1149/2162-8777/ac0b8d
Autor:
Abigail N. Linhart, Jason J. Keleher
Publikováno v:
ECS Meeting Abstracts. :810-810
With the miniaturization of device features, slurry chemistries have become increasingly complex and therefore require enhancement of current cleaning processes. Copper (Cu) chemical mechanical planarization (CMP), a critical process step in the fabr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2bf1694ca3af1d3f57c25f30e1899d62
https://doi.org/10.1149/ma2021-0120810mtgabs
https://doi.org/10.1149/ma2021-0120810mtgabs
Autor:
Katherine M. Wortman-Otto, Ara Philipossian, Yasa Sampurno, Abigail N. Linhart, Jason J. Keleher
Publikováno v:
ECS Journal of Solid State Science and Technology. 10:034002
After defining certain sign conventions for sliding velocity and shear force for a PVA brush scrubbing process, a simple kinematics model is used to calculate net sliding velocities in the brush-wafer contact region. Next, a series of experiments are
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cc6d03ee234281dbc271230d634e310a
https://doi.org/10.1149/2162-8777/abe4a7
https://doi.org/10.1149/2162-8777/abe4a7
Autor:
Jason J. Keleher, Carolyn F. Graverson, Ara Philipossian, Yasa Sampurno, Katherine M. Wortman-Otto, Abigail N. Linhart
Publikováno v:
Materials Chemistry and Physics. 259:124170
Understanding the chemical and mechanical components of supramolecular cleaning chemistries for post-STI CMP cleaning is paramount in reducing defectivity for the continued miniaturization of advanced technologies. Therefore, macroscopic cleaning per
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1749f1e64f0649429b5b55bc1bba92fa
https://doi.org/10.1016/j.matchemphys.2020.124170
https://doi.org/10.1016/j.matchemphys.2020.124170
Autor:
Brian M. Sherry, Katherine M. Wortman-Otto, Abigail L. Dudek, Abigail N. Linhart, Jason J. Keleher
Publikováno v:
ECS Journal of Solid State Science and Technology. 10:024009
As feature sizes continue to shrink well beyond the 7 nm node, understanding the delicate balance present in the chemical mechanical planarization (CMP) process is of utmost importance. In order to achieve high through-put and defect-free CMP process
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::89b808ffd1358cadf737e7105fa424fa
https://doi.org/10.1149/2162-8777/abe7aa
https://doi.org/10.1149/2162-8777/abe7aa