Zobrazeno 1 - 10
of 51
pro vyhledávání: '"Myungjun Lee"'
Autor:
Yunje Cho, Junghee Cho, Jonghyeok Park, Jeonghyun Wang, Seunggyo Jeong, Jubok Lee, Yun Hwang, Jiwoong Kim, Jeongwoo Yu, Heesu Chung, Hyenok Park, Subong Shon, Taeyong Jo, Myungjun Lee, Kwangrak Kim
Publikováno v:
Communications Engineering, Vol 3, Iss 1, Pp 1-15 (2024)
Abstract Scanning Electron Microscopy (SEM) leverages electron wavelengths for nanoscale imaging, necessitating precise parameter adjustments like focus, stigmator, and aperture alignment. However, traditional methods depend on skilled personnel and
Externí odkaz:
https://doaj.org/article/3081f2f02e954ba4b70368661b0facac
Autor:
Jangryul Park, Youngsun Choi, Soonyang Kwon, Youngjun Lee, Jiwoong Kim, Jae-joon Kim, Jihye Lee, Jeongho Ahn, Hidong Kwak, Yusin Yang, Taeyong Jo, Myungjun Lee, Kwangrak Kim
Publikováno v:
Light: Science & Applications, Vol 13, Iss 1, Pp 1-14 (2024)
Abstract As semiconductor devices shrink and their manufacturing processes advance, accurately measuring in-cell critical dimensions (CD) becomes increasingly crucial. Traditional test element group (TEG) measurements are becoming inadequate for repr
Externí odkaz:
https://doaj.org/article/a25a851f4dcc4fcc9fe3ebbc71b740a3
Autor:
Hojun Lee, Jangwoon Sung, Seungbeom Park, Junho Shin, Hyungjin Kim, Wookrae Kim, Myungjun Lee
Publikováno v:
Scientific Reports, Vol 14, Iss 1, Pp 1-13 (2024)
Abstract The demand for high-resolution and large-area imaging systems for non-destructive wafer inspection has grown owing to the increasing complexity and extremely fine nature of semiconductor processes. Several studies have focused on developing
Externí odkaz:
https://doaj.org/article/b4815c7883e8465685881599413e7674
Autor:
Tianxiang Dai, Thaibao Phan, Evan W. Wang, Soonyang Kwon, Jaehyeon Son, Myungjun Lee, Jonathan A. Fan
Publikováno v:
Microsystems & Nanoengineering, Vol 9, Iss 1, Pp 1-9 (2023)
Abstract We introduce an imaging system that can simultaneously record complete Mueller polarization responses for a set of wavelength channels in a single image capture. The division-of-focal-plane concept combines a multiplexed illumination scheme
Externí odkaz:
https://doaj.org/article/c465d042db144cb68e1076173ac3f703
Publikováno v:
Light: Science & Applications, Vol 11, Iss 1, Pp 1-14 (2022)
Abstract As smaller structures are being increasingly adopted in the semiconductor industry, the performance of memory and logic devices is being continuously improved with innovative 3D integration schemes as well as shrinking and stacking strategie
Externí odkaz:
https://doaj.org/article/5599fb7e3c534791b9815f15b9971561
Autor:
Serhan O. Isikman, Alon Greenbaum, Myungjun Lee, Waheb Bishara, Onur Mudanyali, Ting-Wei Su, Aydogan Ozcan
Publikováno v:
Analytical Cellular Pathology, Vol 35, Iss 4, Pp 229-247 (2012)
The recent revolution in digital technologies and information processing methods present important opportunities to transform the way optical imaging is performed, particularly toward improving the throughput of microscopes while at the same time red
Externí odkaz:
https://doaj.org/article/76f0a72dc9524ce189a17a0e37ba9341
Autor:
JunTaek Oh, Jaehyeon Son, Eunsoo Hwang, Jinwoo Ahn, Jaewon Lee, Byungkwan Oh, Donggun Lee, Seunga Lim, Kihun Kang, Sangil Im, Jibin Jeong, Taehyun Yun, Jinsoo Lee, Changhyeong Yoon, Hyukjoon Cho, Gangbu Kim, Byeongki Kang, Hankyoul Moon, Jong-hyun Hwang, Youngkyu Park, Taejoong Kim, Suyoung Lee, Yusin Yang, Myungjun Lee
Publikováno v:
Metrology, Inspection, and Process Control XXXVII.
Autor:
Jaehyeon Son, JunTaek Oh, Eunsoo Hwang, Jinwoo Ahn, Jaewon Lee, Byungkwan Oh, Donggun Lee, Seunga Lim, Kihun Kang, Sangil Im, Jibin Jeong, Taehyun Yun, Jinsoo Lee, Changhyeong Yoon, Hyukjoon Cho, Gangbu Kim, Byeongki Kang, Hankyoul Moon, Jong-hyun Hwang, Youngkyu Park, Taejoong Kim, Suyoung Lee, Yusin Yang, Myungjun Lee
Publikováno v:
Metrology, Inspection, and Process Control XXXVII.
Autor:
Garam Choi, Jinyong Kim, Daehoon Han, Young-Uk Jin, Soonhong Hwang, Jinseob Kim, Wookrae Kim, Jaehwang Jung, Seungwoo Lee, Taejoong Kim, Jinwoo Ahn, Myungjun Lee, Gideok Kim, Su-Young Lee, Yusin Yang
Publikováno v:
Metrology, Inspection, and Process Control XXXVII.
Autor:
Jaehwang Jung, Wookrae Kim, Jinseob Kim, Seungwoo Lee, Inho Shin, Changhyeong Yoon, Seoyeon Jeong, Yasuhiro Hidaka, Mitsunori Numata, Shinji Ueyama, Changhoon Choi, Myungjun Lee
Publikováno v:
Optics express. 30(26)
We present an innovative ellipsometry technique called self-interferometric pupil ellipsometry (SIPE), which integrates self-interference and pupil microscopy techniques to provide the high metrology sensitivity required for metrology applications of