Zobrazeno 1 - 10
of 45
pro vyhledávání: '"Myakon'kikh, A. V."'
Publikováno v:
Technical Physics. Feb2018, Vol. 63 Issue 2, p235-242. 8p.
Mechanisms of the Redistribution of Carbon Contamination in Films Formed by Atomic Layer Deposition.
Publikováno v:
Russian Microelectronics; Aug2023, Vol. 52 Issue 4, p303-311, 9p
Autor:
Lomov, A. A.1 lomov@ftian.ru, Myakon’kikh, A. V.1, Chesnokov, Yu. M.2, Denisov, V. V.3,4, Kirichenko, A. N.3, Denisov, V. N.3,4,5
Publikováno v:
Technical Physics Letters. Apr2018, Vol. 44 Issue 4, p291-294. 4p.
Autor:
Antonov, V. A., Popov, V. P., Tarkov, S. M., Myakon'kikh, A. V., Lomov, A. A., Rudenko, K. V.
Publikováno v:
Optoelectronics Instrumentation & Data Processing; Dec2022, Vol. 58 Issue 6, p556-563, 8p
Publikováno v:
Russian Microelectronics; Aug2022, Vol. 51 Issue 4, p199-209, 11p
Publikováno v:
Russian Microelectronics; Jan2021, Vol. 50 Issue 1, p54-62, 9p
Autor:
Seregin, D. S., Baziruvikha, A. -M., Kotova, N. M., Vorotilov, K. A., Delimova, L. A., Zaitzeva, N. V., Myakon’kikh, A. V., Rudenko, K. V., Lukichev, V. F.
Publikováno v:
Bulletin of the Russian Academy of Sciences: Physics; Mar2018, Vol. 82 Issue 3, p341-345, 5p
Publikováno v:
Russian Microelectronics; May2019, Vol. 48 Issue 3, p157-166, 10p
Autor:
Tolstoguzov, A. B., Drozdov, M. N., Ieshkin, A. E., Tatarintsev, A. A., Myakon'kikh, A. V., Belykh, S. F., Korobeishchikov, N. G., Pelenovich, V. O., Fu, D. J.
Publikováno v:
JETP Letters; Aug2020, Vol. 112 Issue 3, p467-471, 5p
Publikováno v:
Russian Microelectronics; Jan2018, Vol. 47 Issue 1, p1-10, 10p