Modeling the growth of thin SnO2 films using spray pyrolysis deposition.

Autor: Filipovic, Lado, Selberherr, Siegfried, Mutinati, Giorgio Cataldo, Brunet, Elise, Steinhauer, Stephan, Kock, Anton, Teva, Jordi, Kraft, Jochen, Siegert, Jorg, Schrank, Franz, Gspan, Christian, Grogger, Werner

Publikováno v: 2013 International Conference on Simulation of Semiconductor Processes & Devices (SISPAD); 2013, p208-211, 4p