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pro vyhledávání: '"Muthapillai Rajavelu"'
Publikováno v:
Micro & Nano Letters. 8:753-756
Focused research efforts on enhancing the sensitivity of piezoresistive MEMS pressure sensors have been made in the past. Most of these techniques applied to enhance sensitivity have depended on manipulating the geometries of the diaphragm, selection
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::420b9ec81c56512a4187479811931bc4
https://doi.org/10.1049/mnl.2013.0496
https://doi.org/10.1049/mnl.2013.0496
