Future Contributions

Autor: Ando, S., Angulo, J., Batchelor, D., Corrochano, E. Bayro, Beeli, C., Bobisch, C., Möller, R., Bociort, F., Bosch, E., Lazic, I., Bredies, K., Broers, A., Chandra, N., Ghosh, R., Rodriguez, A. Cornejo, Agustin, F. Granados, Edee, K., Edgcombe, C., Elorza, J., Forbes, R.G., Gai, P.L., Boyes, E.D., Haschke, M., Herring, R., McMorran, B., Isaacson, M.S., Ishizuka, K., Jensen, K., Shiffler, D., Luginsland, J., Jourlin, M., Kaiser, U., Kirk, T., Kirkland, A.I., Clough, R., Mir, J., Koch, C.T., Krivanek, O.L., Kroupa, M., Lencová, B., Lichte, H., Matsuya, M., Monsoriu, J.A., Muray, L., Nepijko, S.A., Dyukov, V.G., Schönhense, G., O'Keefe, M.A., Paganin, D., Gureyev, T., Pavlov, K., Papamarkos, N., Kesidis, A., Qin, H., Ramasse, Q., Brydson, R., Rieger, B., Koster, A.J., Rocca, P., Donelli, M., Rodenburg, J., Rouse, J., Liu, H.-n., Munro, E., Sánchez, J., Santi, P., Sciau, P., Shimizu, R., Ikuta, T., Takai, Y., Soma, T., Taneja, I.J., Tanigaki, T., Valdés, J.

Publikováno v: In Advances in Imaging and Electron Physics 2016 194:xv-xvii

Variable probe current using a condenser lens in a miniature electron beam column.

Autor: Silver, C. S., Spallas, J. P., Muray, L. P.

Publikováno v: Proceedings of SPIE; Nov2009, Issue 1, p737810-737810-7, 7p

Arrayed miniature electron beam columns for mask making.

Autor: Spallas, J. P., Silver, C. S., Muray, L. P.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Nov/Dec2006, Vol. 24 Issue 6, p2892-2896, 5p, 4 Black and White Photographs, 2 Diagrams, 2 Charts, 1 Graph

Silicon photodiodes for low-voltage electron detection in scanning electron microscopy and electron beam lithography.

Autor: Silver, C. S., Spallas, J. P., Muray, L. P.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Nov/Dec2006, Vol. 24 Issue 6, p2951-2955, 5p, 1 Black and White Photograph, 1 Diagram, 4 Graphs

Advances in arrayed microcolumn lithography.

Autor: Muray, L. P., Spallas, J. P., Stebler, C., Lee, K., Mankos, M., Hsu, Y., Gmur, M., Chang, T. H. P.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 6, p3099-3104, 6p