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pro vyhledávání: '"Muneyasu Masuda"'
Autor:
You Yin, Jing Liu, Sumio Hosaka, Takashi Akahane, Miftakhul Huda, Takuya Komori, Zulfakri bin Mohamad, Muneyasu Masuda
Publikováno v:
Key Engineering Materials. 596:78-82
We investigated the possibility of ordering of 12 nm pitced self-assembled nanodots from block copolymer (BCP) improved by the guide pattern with low line edge roughness (LER) for patterned media. We found that LER of the line pattern (σ-value) was
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc047b8c1f78ce8e37dcad403482ad00
https://doi.org/10.4028/www.scientific.net/kem.596.78
https://doi.org/10.4028/www.scientific.net/kem.596.78
